中國(guó)國(guó)家電子級(jí)超純水標(biāo)準(zhǔn)

電阻率
25℃
MΩ*cm

Si
≤μg/L

Cu
≤μg/L

Zn
≤μg/L

Ni
≤μg/L

Na
≤μg/L

K
≤μg/L

Cl
≤μg/L

>1μm 顆粒
≤N/ml

細(xì)菌
≤N/ml

Agno3
≤g/L

-PO4 ≤μg/L

SO4、≤μg/L

TOC
≤μg/L

EW-I

≥18*

2

0.2

0.2

0.1

0.5

0.5

1

0.1

0.01

1

1

1

20

EW - II

≥15 **

10

1

1

1

2

2

1

5

0.1

1

1

1

100